Micro-nano Fabrication and Characterization Services for Academic and Industrial R&D

Tuesday, November 25 - 2014


This webinar will take place on Tuesday, November 25 from 1:00 – 2:00pm EST

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Innovation in new microsystems technologies, such as next-generation electronics, photonic circuits, MEMS, and lab-on-a-chip biosensors, requires advanced, flexible nanomaterials and microfabrication processes.

Micro-nano fabrication labs in universities can provide critical prototyping capability for R&D.  The volume and diversity of microsystems technology development is growing, and these university labs can address the prototyping needs of academic innovators, industry, and entrepreneurs.

CMC Microsystems will present an overview of FACT Services (Fabrication, Assembly, Characterization, Test) for micro-nano R&D. FACT Services delivers results for academic and commercial clients using expertise and toolsets in a network of service-ready university nanofabrication labs across Canada. FACT Services will create a dedicated project to meet custom fabrication needs, including engineering consultation, process development, characterization, and early-stage production.

Four labs in the FACT Network will showcase their service capabilities using examples of customer projects.

  • 3IT.Nano lab, Université de Sherbrooke: Innovation from nanoconcepts to macrosystems, and fundamental research to real market applications.
  • nanoFAB, University of Alberta: Highlights from nanoFAB’s nanofabrication and characterization capabilities, including products fabricated in the lab by industrial users, and fee-for-service projects recently completed for both industrial and academic clients.
  • Toronto Nanofabrication Center (TNFC), University of Toronto: An introduction to the process capabilities and services at TNFC, and the R&D enabled in lab-on-a-chip microfluidics, MEMS/NEMS, nano-photonics, micro/nano-electronic devices, integrated optics, nano-plasmonics, and photovoltaic devices.
  • Thin Films Group (GCM), Polytechnique Montréal: Summary of capabilities and expertise in microfabrication and material characterization equipment in different labs regrouped under Central Facilities Management in the campus of Université de Montréal, along with examples of projects realized in GCM.

The webinar will conclude with Q&A and an opportunity for participant feedback.


Andrew Fung is the Client Technology Advisor, Microsystems and Nanotechnology at CMC Microsystems in Kingston, where he connects academic and industrial researchers to advanced manufacturing capabilities. Andrew’s research has leveraged nanotechnology in the development of point-of-care biomedical devices. He obtained a PhD in Biomedical Engineering from the University of California Los Angeles.

Aaron Hryciw is the Nanofabrication Engineer at University of Alberta’s nanoFAB, where he coordinates fee-for-service projects and provides support for electron-beam lithography process development. As a research associate at NRC-National Institute for Nanotechnology, Aaron developed nanophotonic devices. He completed a PhD in Physics from the University of Alberta and a postdoctoral fellowship at Stanford University.

Marie-Josée Gour is Manager of External Services at Institut interdisciplinaire d’innovation technologique (3IT) Nano lab, Université de Shebrooke, with a concentration in plasma etching. Marie-Josée’s previous work includes design of optical networks at Nortel Networks and research in quantum-well infrared photodetectors at the National Research Council of Canada. She completed Bachelor’s and Master’s degrees at Université de Sherbrooke.

Edward Xu is Technical Manager of the Pratt Microfabrication Facility at the Toronto Nanofabrication Centre (TNFC) at University of Toronto. His work there has ranged from SiGe-HBT-BiCMOS, GaN-power-devices, to high-K-dielectric-technology. Edward received his PhD from Shanghai Institute of Microsystem and Information Technology and worked as an STA-fellow on BST-microbolometer-image-sensors.

Alireza Mesgar is a Research Associate with the Microfabrication Laboratory (LMF) of the Thin Films Group (GCM) at Polytechnique Montréal. With an electrical engineering background, he has worked for over 10 years in the microfabrication and microsystems field for applications such as RF-MEMS, optical and photonic MEMS, microfluidics, and biosensing.

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